Journal_of_Vacuum_Science_and_Technology References

*Journal of Vacuum Science and Technology*
Discipline	Physics
Language	English
Edited by	Eray Aydil
Publication details
History	1964–present
Publisher	American Institute of Physics on behalf of the American Vacuum Society (United States)
Frequency	Bimonthly
Impact factor	2.427 (Part A); 1.416 (Part B) (2020)
Standard abbreviations;
ISO 4	J. Vac. Sci. Technol.
Indexing;
	Journal of Vacuum Science and Technology
ISSN	0022-5355;
	Journal of Vacuum Science and Technology A
CODEN	JVTAD6
ISSN	0734-2101 (print); 1520-8559 (web);
LCCN	83643441
OCLC no.	08697396
	Journal of Vacuum Science and Technology B
CODEN	JVTBD9
ISSN	0734-211X;
LCCN	83642371
OCLC no.	08697479
Links
	Journal homepage; Part A; Part B;

The Journal of Vacuum Science and Technology is a peer-reviewed scientific journal published in two parts, A and B, by the American Institute of Physics on behalf of the American Vacuum Society. It was established in 1964 and the editor-in-chief is Eray Aydil ( University of Minnesota).

History

1964–1982 Journal of Vacuum Science and Technology
1983–present Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
1983–1990 Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
1991–present Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Part A

Part A covers applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology. According to the Journal Citation Reports, the journal has a 2015 impact factor of 1.724.^[1]

Part B

Part B covers vacuum and plasma processing of various materials, their structural characterization, microlithography, and the physics and chemistry of submicrometer and nanometer structures and devices. According to the Journal Citation Reports, the journal has a 2014 impact factor of 1.398.^[2]