A high performance positioning system (HPPS) is a type of
positioning system consisting of a piece of
electromechanics equipment (e.g. an assembly of
linear stages and
rotary stages) that is capable of moving an object in a
three-dimensional space within a work envelope. Positioning could be done point to point or along a desired path of
motion. Position is typically defined in
six degrees of freedom, including linear, in an x,y,z
cartesian coordinate system, and angular
orientation of yaw, pitch, roll. HPPS are used in many manufacturing processes to move an object (tool or part) smoothly and accurately in six degrees of freedom, along a desired path, at a desired orientation, with high
acceleration, high
deceleration, high
velocity and low
settling time. It is designed to quickly stop its motion and accurately place the moving object at its desired final position and orientation with minimal jittering.
HPPS requires a structural characteristics of low moving mass and high stiffness. The resulting system characteristic is a high value for the lowest
natural frequency of the system. High natural frequency allows the
motion controller to drive the system at high
servo bandwidth, which means that the HPPS can reject all motion disturbing frequencies, which act at a lower frequency than the bandwidth. For higher frequency disturbances such as
floor vibration,
acoustic noise, motor cogging, bearing jitter and
cable carrier rattling, HPPS may employ structural
composite materials for
damping and
isolation mounts for
vibration attenuation. Unlike articulating robots, which have
revolute joints that connect their links, HPPS links typically consists of sliding joints, which are relatively stiffer than revolute joints. That is the reason why high performance positioning systems are often referred to as
cartesian robots.
Performance
HPPS, driven by linear motors, can move at a combined high velocity on order of 3-5 m/s, high accelerations of 5-7 g, at
micron or sub micron positioning accuracy with settling times on order of milliseconds and servo bandwidth of 30-50 Hz. Ball screw actuators, on the other hand, have typical bandwidth of 10-20 Hz and belt driven actuators at about 5-10 Hz. The bandwidth value of HPPS is about 1/3 of the lowest natural frequency in the range of 90-150 Hz. Settling time to +/- 1% Constant Velocity, or + / - 1 um jitter, after high acceleration or high deceleration respectively, takes an estimated 3 bandwidth periods. For example, a 50 Hz servo bandwidth, having a 1 / 50 · 1000 = 20 msec period, will settle to 1 um position accuracy within an estimated 3 · 20 = 60 msec. The lowest natural frequency equals the square root of system stiffness divided by moving inertia. A typical linear recirculating bearing rail, of a high performance positioning stage, has a stiffness on order of 100-300 N/um. Such a performance is required in
semiconductor process equipment, electronics
assembly lines, numerically controlled
machine tools,
coordinate-measuring machines,
3D Printing,
pick-and-place machines,
drug discoveryassaying and many more. At their highest performance HPPS may use
granite base for thermal stability and flat surfaces,
air bearings for
jitter free motion, brushless
linear motors for non contact, frictionless actuation, high force and low inertia, and laser interferometer for sub micron position feedback. On the other hand, a typical 6 degrees of freedom
articulated robot, with 1 m' reach, has a structural stiffness on the order of 1 N/um. That is why articulated robots are best being employed as automation equipment in processes which require position repeatability on the order of 100's microns, such as
robot welding,
paint robots,
palletizers and many more.
History
The original HPPS were developed at Anorad Corporation (now
Rockwell Automation) in the 1980s, after the invention of brushless
linear motors by Anorad's Founder and CEO,
Anwar Chitayat. Initially HPPS were used for high precision manufacturing processes in semiconductor applications such as
Applied Materials,
PCB Inspection
Orbotech and High Velocity Machine Tool
Ford.[1] In parallel linear motor technology and their integration in HPPS, was expanded around the world. As a result, in 1996
Siemens integrated its CNC with Anorad linear motors to drive a 20 m' long Maskant machine at
Boeing for
chemical milling of
aircraft wings. [2] In 1997
FANUC licensed Anorad's linear motor technology and integrated it as a complete solution with their CNC products line. [3] And in 1998, Rockwell Automation acquired Anorad to compete with Siemens and Fanuc in providing a complete linear motor solutions to drive high velocity machine tools in Automotive
transfer lines.[4] Today linear motors are being used in hundreds of thousands high performance positioning systems, which drive manufacturing processes around the world. Their market is expected to grow, according to some studies, at 4.4% a year and reach $1.5B in 2025. [5]
System
specification (technical standard) is an official interface between the application requirements (problem), as described by the user (customer) and the design (solution) as optimized by the developer (supplier).
Inertia - Indicates the resistance of the moving load (tool or part) to linear (kg) and angular (kg·m2) change in velocity. To maximize natural frequency the inertia of the moving load should be minimal.
Size - Indicates the geometrical constraints of the system's width (m), length(m) and height (m), as may be needed for handling, transport as installation.
Motion - Indicates process cycle time (s) and process constraints for each
degree of freedom, including maximum travel (m, rad), maximum velocity (m/s, rad/s) and maximum acceleration/deceleration (m/s2, rad/s2).
Jitter - Indicates maximum amplitude (um) of high frequency vibrations which is allowed at stand still conditions.
Constant velocity - Indicates the required smoothness of motion and allowed variations in (+/- %) of required constant velocity (m/s, rad/s) during motion.
Stiffness - Indicates the resistance of position change in response to external load (N/um, N·m/rad).
Life - indicates the expected time (hrs) or travel (km) the most active degree of freedom of the system is expected to act reliably in process operation.
Maintainability -
Mean time to repair (hrs), often associated with system manuals including, operation, maintenance schedule and spare parts list.
Environment - Indicates the expected disturbance conditions that the system may encounter during operation within its life time including Thermal, Humidity, Shock and Vibration, Cleanliness and Radiation.
Environment
Thermal - Indicates the highest and lowest
temperature (°C) that the system may endure during operation. Effects structural deformations and precision. May require cooling, insulation and low thermal conductivity material.
Humidity - Indicated the level of water vapors in the surrounding air (%). May include the required system protection based on
IP Code. May require protective seals.
Shock (mechanics) and Vibration - Indicates the level of
floor vibration and other process disturbances. May require active or passive vibration isolation mounts and structural material with high damping. [12]
Cleanliness - Indicates the allowable level (size and quantity per unit volume) of particles in the surrounding air. May require
cleanroom operation, filtration of incoming air and protective seals. [13]
Radiation -
Electromagnetic interference may require shielded cable management, non ferrous structural material and protective shields of the linear motor magnet plates.
System solution
Configuration
HPPS configuration is typically optimized for maximum structural stiffness with maximum damping and minimum inertia, smallest
Abbe error at the point of interest (POI), with minimum components and maximum maintainability.
XYZ - A customized assembly of single stages, including moving
cable management. Z axis is typically actuated with a ball screw or linear motor with a
counterbalance. Axes may be separated to reduce inertia.
XYZR - Rotational axes including pitch, yaw and roll are typically added in HPPS for orienting the end of arm tool (EOAT) or
Robot end effector.
Gantry - Gantry configuration provides maximum work envelope in XYZ configuration per given size constraints. It has 2 parallel axes for x, controlled as a single axis or master / slave. Ideal for
transfer lines.
Rotary (pitch, yaw, roll) -
Rotary stages may be customized with
linear stage at various order to best meet the specifications. They are typically using
direct-drive mechanism, analogous to linear motors.
Custom - Custom configurations of HPPS may be required in the
mathematical optimization process of integrating the best system components into the most compact, and responsive system.
System analysis
System analysis is a process of understanding the relationships between design parameters, operating conditions, environmental variables and system performance based on
system modeling and analysis tools
Accuracy and precision - Estimating 3D static errors at the point of interest as a function of axes straightness, flatness, pitch, yaw, roll, wobble and ran-outs using analysis tools such as
Mathcad,
Microsoft Excel
Component sizing is the process of selecting standard parts from component suppliers, or designing a custom part for manufacturing
Frame - Typically made of aluminum or steel weldments of hollow tubes, possibly filled in with concrete composite for damping. Mounted on leveling pads and secured to floor possibly with earthquake posts.
slide, base - High precision bases use granite for flatness and thermal stability. Lower precision standard stages use extruded aluminum. Custom stages typically use ribbed aluminum or stainless steel machined for low inertia high stiffness.
bearing - Options include cross roller bearing for relatively short travel, recirculating bearing for higher stiffness longer travel and
air bearing with
granite base for high smoothness of motion, higher precision.
servo motor - Typically linear
brushless DC electric motor for horizontal axes with 3 phase synchronized current in moving coil and field in stationary, low cogging, magnet plates. For vertical linear motor axes a counterbalance may be used. Rotary stages use similar 2 parts, direct drive motor, including a stationary coil armature and a moving magnetic rotor.
feedback - Typically high resolution encoder, optical, magnetic or captative, analog or digital, linear or rotary, absolute or
Incremental encoder with index mark for homing. Laser
interferometry for long travel, sub-micron precision.
forcer - Forcer options include
ball screw for high force,
rack and pinion for long travel and
timing belt drive for high velocity. Their limitations in HPPS is friction, jitter, backlash, lower stiffness and maintenance.
cable management - For power and signal transmission. The weakest link of the system reliability chain. Lower bend radius for low profile increases fatigue. Requires cable carrier or using flat ribbon cable. Introduce jitter.
servo drive - Amplifying motion control signals to drive servo motors. Ranging from low power to 10s KW. For example, 40 KW in driving high force linear motor of 10,000 N moving at 4 m/s. DC voltage ranges from a safe 24V/48V to over 400 V. High current loop update rates, of motor signals, are on order of thousands of Hz. Popular network communication with motion controller is via
EtherCAT.
Motion
PID controller - Options include computer
numerical control (CNC), single axis, multi axis, PC based, stand alone or integrated with servo drive and /or PLC, including I/O, auto tuning, diagnostic and programming available from multiple sources. [15]
System testing is an iterative process of system development, intended to validate system analysis modeling, proof of concepts, safety factor of performance specifications and acceptant testing.
Motion travel, maximum velocity, maximum acceleration, jerk - Commonly provided within the motion controller.
Mean time between failure, Life test - Non stop operation for specified period without a failure in extreme operating conditions under continuous monitoring with frequent visual and sensor checking. [19]
^ Czajkowski, Stephen (September 1996).
"Linear motors: The future of high-performance machine tools". Siemens and Anorad Corp. decided information was needed to support the major role high-performance linear motors will play as the prime machine-tool actuator.
^"Motion Control Online". mcma motion control & motor association. Companies that manufacture motion control, motors, software or related products and equipment
^"XL-80 laser system". The Renishaw XL-80 laser interferometer offers the ultimate in high performance measurement and calibration for motion systems, including CMMs and machine tools
^Kensler, Jennifer (March 21, 2014).
"Reliability Test Planning for Mean Time Between Failures Best Practice"(PDF). STAT T&E COE-Report-09-2013. The goal...is to assist in developing rigorous, defensible test strategies to more effectively quantify and characterize system performance and provide information that reduces risk