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verification. (February 2014) |
Semiconductor device fabrication |
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MOSFET scaling ( process nodes) |
Future
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The 3 μm process is the level of MOSFET semiconductor process technology that was reached around 1977, [1] [2] by leading semiconductor companies such as Intel.
Preceded by 6 μm process |
MOSFET semiconductor device fabrication process | Succeeded by 1.5 μm process |