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Semiconductor manufacturing process
The 1 μm process (1 micrometre process ) is a level of
MOSFET
semiconductor process technology that was commercialized around the 1984–1986 timeframe,
[1]
[2] by leading semiconductor companies like
NTT ,
NEC ,
Intel and
IBM . It was the first process where
CMOS was common (as opposed to
NMOS ).
The earliest MOSFET with a 1 μm
NMOS channel length was fabricated by a research team led by
Robert H. Dennard , Hwa-Nien Yu and F.H. Gaensslen at the
IBM T.J. Watson Research Center in 1974.
[3]
Products featuring 1.0 μm manufacturing process
NTT introduced the 1 μm process for its
DRAM memory chips, including its 64k in 1979 and 256k in 1980.
[4]
NEC 's 1
Mbit DRAM memory chip was manufactured with the 1 μm process in 1984.
[5]
Intel 80386
CPU launched in 1985 was manufactured using this process.
[1]
Intel uses this process on the
CHMOS III-E technology.
[6]
Intel uses this process on the CHMOS IV technology.
[7]
References
^
a
b Mueller, S (21 July 2006).
"Microprocessors from 1971 to the Present" . informIT.
Archived from the original on 19 April 2015. Retrieved 11 May 2012 .
^ Myslewski, R (15 November 2011).
"Happy 40th birthday, Intel 4004!" . TheRegister.
Archived from the original on 19 April 2015. Retrieved 19 April 2015 .
^
Dennard, Robert H. ; Yu, Hwa-Nien; Gaensslen, F. H.; Rideout, V. L.; Bassous, E.; LeBlanc, A. R. (October 1974).
"Design of ion-implanted MOSFET's with very small physical dimensions" (PDF) .
IEEE Journal of Solid-State Circuits . 9 (5): 256–268.
Bibcode :
1974IJSSC...9..256D .
doi :
10.1109/JSSC.1974.1050511 .
S2CID
283984 .
^ Gealow, Jeffrey Carl (10 August 1990).
"Impact of Processing Technology on DRAM Sense Amplifier Design" (PDF) .
Massachusetts Institute of Technology . pp. 149–166. Retrieved 25 June 2019 – via
CORE .
^
"Memory" . STOL (Semiconductor Technology Online) . Retrieved 25 June 2019 .
^ Intel Corporation, "New Product Focus: Components: Two-and Four-Megabit EPROMs are High-Density Performers", Microcomputer Solutions, September/October 1989, page 14
^ Intel Corporation, "New Product Focus: Components: New ASSP Suits Mobile Applications", Microcomputer Solutions, September/October 1990, page 11
External links